Using capacitive sensors for in situ calibration of displacements in a piezo-driven translation stage of an STM
- 31 March 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 36 (1) , 37-42
- https://doi.org/10.1016/0924-4247(93)80138-7
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Calibration and characterization of piezoelectric elements as used in scanning tunneling microscopyReview of Scientific Instruments, 1991
- Deformations and nonlinearity in scanning tunneling microscope imagesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- High-temperature scanning tunneling microscopeJournal of Vacuum Science & Technology A, 1990
- Thermal roughening studied by scanning tunneling microscopyJournal of Vacuum Science & Technology A, 1990
- Application of capacitance techniques in sensor designJournal of Physics E: Scientific Instruments, 1986
- Surface Studies by Scanning Tunneling MicroscopyPhysical Review Letters, 1982