MEMS-tunable 1.55-/spl mu/m VCSEL with extended tuning range incorporating a buried tunnel junction
- 21 February 2006
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 18 (5) , 688-690
- https://doi.org/10.1109/lpt.2006.870066
Abstract
We present an electrically pumped and micromechanically tunable InP-based vertical-cavity surface-emitting laser operating in the 1.55-μm wavelength range. The current confinement is achieved by a buried tunnel junction. The GaAs-based movable top mirror membrane is fabricated separately, assembled on top of the device, and can be actuated electrothermally. A single mode output power of about 1.7 mW and a tuning range of 28 nm was obtained. By the use of an antireflection coating at the semiconductor-air-interface, we were able to extend the tuning range up to 60 nm as expected from one-dimensional simulations.Keywords
This publication has 9 references indexed in Scilit:
- High singlemode output power from long-wavelength VCSELs using curved micro-mirrors for mode controlElectronics Letters, 2005
- MEMS-tunable vertical-cavity SOAsIEEE Journal of Quantum Electronics, 2005
- Long-wavelength tunable vertical-cavity surface-emitting lasers and the influence of coupled cavitiesOptics Express, 2005
- Continuously Tunable Long-Wavelength MEMS-VCSEL With Over 40-nm Tuning RangeIEEE Photonics Technology Letters, 2004
- 1.55-$mu$m Optically Pumped Wafer-Fused Tunable VCSELs With 32-nm Tuning RangeIEEE Photonics Technology Letters, 2004
- Long Wavelength-Tunable VCSELs With Optimized MEMS Bridge Tuning StructureIEEE Photonics Technology Letters, 2004
- Continuously Tunable 1.55-$mu$m VCSEL Implemented by Precisely Curved Dielectric Top DBR Involving Tailored StressIEEE Photonics Technology Letters, 2004
- Singlemode 1.55 µm VCSELs with low threshold and high output powerElectronics Letters, 2003
- Complete polarization mode control of long-wavelength tunable vertical-cavity surface-emitting lasers over 65-nm tuning, up to 14-mW output powerIEEE Journal of Quantum Electronics, 2003