Beamline design for homogeneous irradiation of large exposure fields using synchrotron radiation
- 1 May 1989
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 9 (1-4) , 143-146
- https://doi.org/10.1016/0167-9317(89)90033-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Investigations of x-ray exposure using plane scanning mirrorsJournal of Vacuum Science & Technology B, 1983