Tilted angle implantations of B, Al and Ga in single crystalline Si
- 1 June 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 42 (2) , 155-161
- https://doi.org/10.1016/0168-583x(89)90700-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Tilted angle ion implantationRadiation Effects, 1988
- Computer simulation of atomic-displacement cascades in solids in the binary-collision approximationPhysical Review B, 1974
- Backscattering study on lateral spread of implanted ionsApplied Physics Letters, 1973