MEMS AS A PLATFORM FOR NANOEXPLORATION AND NANOINTEGRATION
- 1 June 2003
- journal article
- Published by World Scientific Pub Co Pte Ltd in International Journal of Computational Engineering Science
- Vol. 4 (2) , 189-194
- https://doi.org/10.1142/s1465876303000880
Abstract
No abstract availableKeywords
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