Structural characterization of cadmium selenide thin films by X-ray diffraction and electron microscopy

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Abstract
X-ray diffraction, transmission electron microscopy and transmission electron diffraction studies on cadmium selenide thin films deposited on glass substrates have been carried out. X-ray line profile analysis of the diffraction patterns has been performed to study the microstructural parameters. The variation of different microstructural parameters, such as crystallite size, RMS strain, dislocation density and stacking fault probability with film thickness as well as substrate temperature is studied. The optimum growth condition is fixed to a film thickness of the order of 1.0 mu m. The change of preferred orientation is observed for films deposited at and above 473 K.