Displacement sensor using channelled spectrum dispersed on a linear CCD array

13 May 1993

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 29 (10) , 896-897
https://doi.org/10.1049/el:19930598

Abstract

A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 μm.

Keywords

BROADBAND SOURCE
LINEAR CCD ARRAY
CHANNELLED SPECTRUM
LOW COHERENCE INTERFEROMETRIC SENSOR
1.5 MM
LASER DIODE SOURCE

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