A proposal for electrically levitating micromotors
- 1 July 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 24 (2) , 141-149
- https://doi.org/10.1016/0924-4247(90)80019-2
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- IC-processed electrostatic micromotorsSensors and Actuators, 1989
- Design considerations for micromachined electric actuatorsSensors and Actuators, 1988
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987
- A Study of Fluid Squeeze-Film DampingJournal of Basic Engineering, 1966