Microprocessors get integrated sensors: Sensing devices and signal processing built into one silicon chip portend a new class of ‘smart’ sensors
- 1 January 1980
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Spectrum
- Vol. 17 (2) , 42-46
- https://doi.org/10.1109/mspec.1980.6330262
Abstract
Considers the development of silicon microsensors which can fit on the same chip with a microprocessor. Various sensor types are described, their fabrication presented and their possible applications pointed to.Keywords
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