Application of Monte Carlo calculation to fundamentals of scanning Auger electron microscopy
- 15 November 1977
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 31 (10) , 692-694
- https://doi.org/10.1063/1.89514
Abstract
Spatial distributions of Auger signals generated in an aluminum target in scanning Auger electron microscopy were obtained by Monte Carlo calculations including secondary electron generation. In the low‐energy region, the cross sections calculated by the partial wave expansion method were used instead of the screened Rutherford cross section to describe the elastic scattering process. The result suggests that secondary electrons of high energy are a significant source of Auger signals, particularly LVV‐Auger electrons, in scanning Auger electron microscopy.Keywords
This publication has 8 references indexed in Scilit:
- Calculation of Electron Spin Polarization for Polarization DetectorJournal of the Physics Society Japan, 1976
- A Monte Carlo approach to the direct simulation of electron penetration in solidsJournal of Physics D: Applied Physics, 1976
- Auger and secondary electrons excited by backscattered electrons; An approach to quantitative analysisSurface Science, 1975
- Auger emission from solids: the estimation of backscattering effects and ionization cross sectionsJournal of Physics D: Applied Physics, 1974
- Mössbauer studies on the superparamagnetic behavior of 69–31 at.% FeNi fine particlesJournal of Applied Physics, 1973
- Escape length of Auger electronsJournal of Applied Physics, 1973
- A linear capacitance micrometerJournal of Physics E: Scientific Instruments, 1972
- Estimates of the Efficiencies of Production and Detection of Electron-Excited Auger EmissionJournal of Applied Physics, 1969