Analysis and design of a four-terminal silicon pressure sensor at the centre of a diaphragm
- 1 July 1987
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 12 (1) , 49-56
- https://doi.org/10.1016/0250-6874(87)87005-1
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Optimum design considerations for silicon pressure sensor using a four-terminal gaugeSensors and Actuators, 1983
- Piezoresistance Effect in Germanium and SiliconPhysical Review B, 1954