Ultraflat Nanosphere Lithography: A New Method to Fabricate Flat Nanostructures

• 23 October 2000
• journal article
• research article
• Published by Wiley in Advanced Materials
• Vol. 12  (20) , 1515-1519
• https://doi.org/10.1002/1521-4095(200010)12:20<1515::aid-adma1515>3.0.co;2-j

Abstract

Keywords

• ALUMINUM
• GOLD
• LITHOGRAPHY
• ULTRAFLAT NANOSPHERE
• NANOSTRUCTURES
• FLAT
• SILICA
• SILVER
• SURFACE PATTERNING