The interaction of excimer laser ultraviolet radiation with Kapton-H in vacuum and under mechanical stress

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Abstract
We examine the response of highly stressed polyimide films to excimer laser radiation (20-ns pulses at 248-nm wavelength) in vacuum. We present changes in surface topography due to surface/near-surface damage, crack initiation, and eventually crack growth over a wide range of applied stress. We show that the morphology of the stressed material has a significant influence on the resulting damage and suggest that the regions of highest damage are those experiencing the highest local stress. Finally, we present initial results on the effect of mechanical stress on yields of the photoablation products ejected from the polymer surface.

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