X-ray characterization of residual stresses in electroplated nickel used in LIGA technique
- 1 September 2000
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 288 (2) , 270-274
- https://doi.org/10.1016/s0921-5093(00)00868-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Microgrippers fabricated by the LIGA techniqueSensors and Actuators A: Physical, 1997
- Détermination des contraintes résiduelles par diffraction des rayons X dans une couche mince de 1 000 Å de tungstèneJournal de Physique III, 1992