High spatial resolution 3D analysis of materials using gallium focused ion beam secondary ion mass spectrometry (FIB SIMS)
- 1 March 1998
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 136-138, 1028-1033
- https://doi.org/10.1016/s0168-583x(97)00790-8
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Quantitative analysis by submicron secondary ion mass spectrometryJournal of Vacuum Science & Technology B, 1988
- High spatial resolution secondary ion mass spectrometry with parallel detection systemJournal of Vacuum Science & Technology A, 1987
- Rotating powder target for ion implanationNuclear Instruments and Methods in Physics Research, 1982