Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass
- 10 May 1999
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 38 (14) , 2986-2990
- https://doi.org/10.1364/ao.38.002986
Abstract
For an integrated free-space optical interconnection system we suggest the use of microprisms to achieve large coupling angles at low loss. Prisms were fabricated in photoresist and quartz glass by analog lithography. High-energy-beam–sensitive glass was used as the gray-tone mask. Optical testing of the prisms shows acceptable surface quality and high efficiency (95%).Keywords
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