Hillock-free integrated-circuit metallizations by Al/Al-O layering
- 1 July 1981
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 52 (7) , 4630-4639
- https://doi.org/10.1063/1.329343
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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