Real-time spectroscopic ellipsometry monitoring of Si1−xGex/Si epitaxial growth

• 1 May 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 13  (3) , 740-744
• https://doi.org/10.1116/1.579818

Abstract

Keywords

• REAL TIME
• EPITAXIAL GROWTH