Preparation of c-BN containing films by reactive r.f. sputtering
- 15 May 1993
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 2 (8) , 1206-1210
- https://doi.org/10.1016/0925-9635(93)90171-w
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Preparation of Boron Nitride Thin Films by Chemical Vapor DepositionMaterials Science Forum, 1991
- Preparation of Cubic Boron Nitride Films by RF SputteringJapanese Journal of Applied Physics, 1990
- The preparation of cubic boron nitride films by reactive diode sputteringThin Solid Films, 1987
- Preparation and characterization of ion-plated boron nitrideThin Solid Films, 1986
- Radio frequency sputter deposited boron nitride filmsJournal of Vacuum Science & Technology A, 1984
- Lattice Infrared Spectra of Boron Nitride and Boron MonophosphidePhysical Review B, 1967
- Normal Modes in Hexagonal Boron NitridePhysical Review B, 1966