Sputtering yield of optical materials: Sigmund’s model and experimental results

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (4) , 1523-1527
• https://doi.org/10.1116/1.579349

Abstract

Keywords

• SPUTTERING YIELD
• MODEL AND EXPERIMENTAL
• SIGMUND
• OPTICAL MATERIALS
• YIELD OF OPTICAL
• EXPERIMENTAL RESULTS