Coherent imaging of periodic thick fine isolated structures
- 1 April 1993
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America A
- Vol. 10 (4) , 614-632
- https://doi.org/10.1364/josaa.10.000614
Abstract
The diffraction orders and coherent bright and dark field images produced by isolated steps and grooves (notches and trenches) are examined. The isolated structures are approximated by means of a grating with a large period that contains small, widely separated, lamellar structures. The rigorous modal method for TE polarized incident light is used for the numerical calculations. Structures in two types of dielectric material, refractive index n = 1.5 and n = 4.0, are discussed. The images are examined for variations with several parameters, including width and thickness of the structure and focus position. Several approximate methods for calculating these images, based on first-order approximations, are suggested.Keywords
This publication has 17 references indexed in Scilit:
- Boundary-element analysis of plane-wave diffraction from groove-type dielectric and metallic gratingsJournal of the Optical Society of America A, 1990
- Frequency-selective reflection and transmission by a periodic dielectric layerIEEE Transactions on Antennas and Propagation, 1989
- Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theoryJournal of the Optical Society of America A, 1988
- Bright-field microscopy of semitransparent objectsJournal of the Optical Society of America A, 1988
- On the numerical study of deep dielectric lamellar gratingsJournal of Optics, 1983
- Diffraction analysis of dielectric surface-relief gratingsJournal of the Optical Society of America, 1982
- Theory of optical edge detection and imaging of thick layersJournal of the Optical Society of America, 1982
- Diffraction by thick, periodically stratified gratings with complex dielectric constantJournal of the Optical Society of America, 1973
- Diffraction of a Plane Wave at a Sinusoidally Stratified Dielectric GratingJournal of the Optical Society of America, 1966
- Electromagnetic diffraction in optical systems, II. Structure of the image field in an aplanatic systemProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1959