Interferometric Measurement of the Diameters of Fused Quartz Spheres

Publisher Website
Google Scholar
Abstract
This paper describes a method for the interferometric measurement of the diameter of a fused quartz sphere with Fabry-Perot etalon. Interference fringes are produced by laser radiation reflected from each surface of the etalon and the adjacent surface of the sphere and then their gaps are measured. The diameter of the sphere is derived by subtracting the two gaps from the plate separation of the etalon. Several lines from a free-running He-Se laser are used as the light sources for the exact fraction method together with the 633 nm line of a Lamb-dip stabilized He-Ne laser. The effects of fringe distortion, caused by laser radiation reflected from the other surface of the transparent sphere, are eliminated by placing a small circular stop at the image point of the light source. Experiments have shown that the precision of measurement of the diameter is about ±0.16 ppm at 95% confidence interval.

This publication has 2 references indexed in Scilit: