Deposition of Germanium Films by Sputtering

• 1 January 1965
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 112  (5) , 500
• https://doi.org/10.1149/1.2423582

Abstract

Keywords

• GERMANIUM FILMS BY SPUTTERING
• DEPOSITION OF GERMANIUM FILMS