A Spin-Polarized Scanning Electron Microscope with 5-nm Resolution
- 1 November 2001
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 40 (11B) , L1264
- https://doi.org/10.1143/jjap.40.l1264
Abstract
For studying sub-10-nm-scale magnetic structures, a high-resolution spin-polarized scanning electron microscope (spin SEM) was developed. It has a specially designed, compact secondary-electron collector that produces a finer probe beam than that of a conventional spin SEM. By observing a narrow magnetic domain wall of SmCo5, the developed spin SEM was shown to have a high resolution of 5 nm.Keywords
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