Fabrication and performance analysis of film bulk acoustic wave resonators

• 18 December 2004
• journal article
• research article
• Published by Elsevier
• Vol. 59  (8-9) , 1012-1016
• https://doi.org/10.1016/j.matlet.2004.11.047

Abstract

Keywords

• RF SPUTTERING
• THIN FILM
• SURFACE MORPHOLOGY
• C-AXIS
• PIEZOELECTRIC