Calibration of step height standards for nanometrology using interference microscopy and stylus profilometry
- 1 January 1995
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 17 (1) , 22-33
- https://doi.org/10.1016/0141-6359(94)00003-i
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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