Design of magnetrons for dc sputtering
- 1 January 1989
- Vol. 39 (7-8) , 717-721
- https://doi.org/10.1016/0042-207x(89)90023-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The current-voltage characteristic of magnetron sputtering systemsJournal of Applied Physics, 1983
- Diagnostic methods for sputtering plasmasJournal of Vacuum Science and Technology, 1978
- Planar magnetron sputteringJournal of Vacuum Science and Technology, 1978
- Magnetron sputtering: basic physics and application to cylindrical magnetronsJournal of Vacuum Science and Technology, 1978