Determination of Surface Reaction Rate Constant by Using Micro-Trench Method in APCVD.
- 1 January 1991
- journal article
- Published by Society of Chemical Engineers, Japan in KAGAKU KOGAKU RONBUNSHU
- Vol. 17 (6) , 1175-1178
- https://doi.org/10.1252/kakoronbunshu.17.1175
Abstract
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