Preparation of a 10 nm thick single-crystal silicon membrane self-supporting over a diameter of 1 mm
- 31 July 2000
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 162-163, 359-367
- https://doi.org/10.1016/s0169-4332(00)00216-6
Abstract
No abstract availableKeywords
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