An in situ glow discharge cleaning method for the LEP vacuum system
- 1 March 1983
- Vol. 33 (3) , 171-178
- https://doi.org/10.1016/0042-207x(83)90008-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The effect of bakeout temperature on the electron and ion induced gas desorption coefficients of some technological materialsVacuum, 1979
- Desorption of neutral molecules from Al(6061) by electron and ion bombardmentJournal of Vacuum Science and Technology, 1978