Hot hollow cathode and its applications in vacuum coating: A concise review

• 1 May 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (3) , 397-402
• https://doi.org/10.1116/1.573890

Abstract

Keywords

• MICROSTRUCTURES
• BOND STRENGTH
• CRYSTAL STRUCTURE