Diffractive techniques for lithographic process monitoring and control

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3600-3606
• https://doi.org/10.1116/1.587479

Abstract

Keywords

• DIFFRACTIVE TECHNIQUES
• LITHOGRAPHIC PROCESS MONITORING
• MONITORING AND CONTROL
• TECHNIQUES FOR LITHOGRAPHIC