Experimental Simulation on the Beam Heating Effects in Ion Implantation Techniques

• 1 July 1973
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 12  (7) , 1075-1076
• https://doi.org/10.1143/jjap.12.1075

Abstract

Keywords

• EXPERIMENTAL SIMULATION
• BEAM HEATING
• ION IMPLANTATION
• IMPLANTATION TECHNIQUES
• HEATING EFFECTS
• EFFECTS IN ION