A Method for Determining Sodium Content of Semiconductor Processing Materials
- 1 January 1968
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 115 (11) , 1191-1196
- https://doi.org/10.1149/1.2410937
Abstract
A refined flame spectrophotometric method has been used to analyze and control sodium content in materials associated with the processing of semiconductor devices. Several examples of materials analyzed are presented which include water oxidation ambients, quartz oxidation tubes, various organic and inorganic solvents, and sedimented glasses. Very good correlations are obtained between sodium content of these materials and corresponding electrical stability of MOS structures. The method is relatively inexpensive and simple to use, with a detection limit in water of 0.05 ppb sodium.Keywords
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