Effects of target temperature on crystallinity and hardness of B+-implanted Fe

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Abstract
Pure Fe is implanted with B+ in a target temperature range of −20–300 °C. The effects of the target temperature on the crystallinity and hardness of the B+ ‐implanted Fe are investigated. It is found that Fe2 B is formed by using direct B+ implantation into pure Fe at target temperatures ranging from −20 to 300 °C without subsequent annealing. ‘‘Cold‐implantation,’’ i.e., implantation at a lower target temperature, reduces crystallinity and increases the hardness of the B+ ‐implanted Fe. By contrast, increased target temperature produces B+ ‐implanted Fe with high crystallinity and relatively low hardness. Discussion focuses on how the target temperature during implantation affects the crystallinity of the B+ ‐implanted Fe from the standpoint of the recrystallization during implantation.