EPR investigation of a-Si:H aerosol particles formed under silane thermal decomposition
- 1 August 1998
- journal article
- Published by Springer Nature in Applied Magnetic Resonance
- Vol. 15 (1) , 59-94
- https://doi.org/10.1007/bf03161884
Abstract
No abstract availableKeywords
This publication has 89 references indexed in Scilit:
- Direct Kinetic Studies of Silicon Hydride Radicals in the Gas PhaseChemical Reviews, 1995
- Some mechanistic problems in the kinetic modeling of monosilane pyrolysisThe Journal of Physical Chemistry, 1992
- Mechanism of the thermally induced gas-phase decomposition of silane: a revisitationThe Journal of Physical Chemistry, 1992
- Silicon chemical vapor deposition one step at a time: fundamental studies of silicon hydride chemistryAccounts of Chemical Research, 1991
- A Model for the Growth of Silicon Particles from Laser-Heated GasesAerosol Science and Technology, 1990
- Role of gas phase reactions in silicon chemical vapor deposition from monosilaneApplied Physics Letters, 1989
- Properties of silicon produced by monosilane pyrolysis.JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 1989
- Production of high-quality amorphous silicon films by evaporative silane surface decompositionJournal of Applied Physics, 1988
- Reaction mechanism and kinetics of silane pyrolysis on a hydrogenated amorphous silicon surfaceThe Journal of Chemical Physics, 1986
- Powder Temperature, Size, and Number Density in Laser-Driven ReactionsAerosol Science and Technology, 1986