A silicon thermocapacitive flow sensor with frequency modulated output
- 31 October 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 57 (1) , 35-39
- https://doi.org/10.1016/s0924-4247(97)80092-1
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Fabrication and modelling of CMOS microbridge gas-flow sensorsSensors and Actuators B: Chemical, 1992
- The dynamic mechanical characteristics of a resonating microbridge mass-flow sensorSensors and Actuators A: Physical, 1991
- Silicon gas flow sensors using industrial CMOS and bipolar IC technologySensors and Actuators A: Physical, 1991
- Resonating microbridge mass flow sensorSensors and Actuators A: Physical, 1990
- Lightly-doped polysilicon bridge as a flow meterSensors and Actuators, 1988
- A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applicationsSensors and Actuators, 1987
- An integrated capacitive pressure sensor with frequency-modulated outputSensors and Actuators, 1986
- An integrated silicon double bridge anemometerSensors and Actuators, 1983
- Thermopiles fabricated using silicon planar technologySensors and Actuators, 1982
- A monolithic capacitive pressure sensor with pulse-period outputIEEE Transactions on Electron Devices, 1980