Liquid target pulsed laser deposition
- 14 August 1995
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 67 (7) , 1022-1024
- https://doi.org/10.1063/1.114717
Abstract
A novel pulsed laser deposition (PLD) technique using a liquid target has been developed. The technique overcomes the problem of solid target deterioration under high power laser irradiation and prevents splashing of large particulates on the substrate. Choosing an organic liquid containing carbon and hydrogen as a testing target, we have obtained high quality hydrogenated carbon films with a large amount of tetrahedral (diamond-like) sp3 bonding.Keywords
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