Stress and stress relaxation in integrated circuit metals and dielectrics

• 1 July 1991
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 9  (4) , 1956-1962
• https://doi.org/10.1116/1.585387

Abstract

Keywords

• STRUCTURAL CHANGE
• MATERIALS SCIENCE
• THERMAL CYCLING
• PHOSPHORUS
• ROOM TEMPERATURE
• INTEGRATED CIRCUIT
• STRESS RELAXATION
• ACTIVATION ENERGY