SiC Devices with ONO Stacked Dielectrics

• 10 May 2000
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 338-342, 1093-1096
• https://doi.org/10.4028/www.scientific.net/msf.338-342.1093

Abstract

Keywords

• ALTERNATE DIELECTRIC
• INTERFACE STATES (OR TRAPS)
• METAL-OXIDE-SEMICONDUCTOR FIELD EFFECT TRANSISTOR (MOSFET)
• MOBILITY
• ONO DIELECTRIC
• RELIABILITY