Optical optimization of line deletion and personalization parameters on polymide films
- 1 November 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 85 (2) , 111-117
- https://doi.org/10.1016/0040-6090(81)90623-4
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Planar multilevel interconnection technology employing a polyimideIEEE Journal of Solid-State Circuits, 1978
- Absorption phenomena in metal drilling with Nd-lasersIEEE Journal of Quantum Electronics, 1978
- Laser processing of thin films (review)Soviet Journal of Quantum Electronics, 1976
- Metal reflectivity under high−intensity optical radiationApplied Physics Letters, 1975