Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material
- 1 January 1997
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 33 (1-4) , 327-334
- https://doi.org/10.1016/s0167-9317(96)00061-5
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Benzocyclobutenes in polymer synthesisPublished by Elsevier ,2003
- Elastic relationships in layered composite media with approximation for the case of thin films on a thick substrateJournal of Applied Physics, 1987