Preparation of Ferroelectric Films of Laminated Polyurea Thin Films onto PZT Deposited Films and their Electric Properties.

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Abstract
Polyurea films of 0.1 to 0.3 μ m in thickness with vapor deposition polymerization system have been laminated on PZT deposited films of 1 to 4 μm in thickness with aerosol jet printing system. This structure of the laminated film has been tested in order to increase its electrostatic capacity without reducing breakdown voltage. By SEM observation, the surface of PZT film with roughness of submicron level has been closely covered by polyurea thin film. Electrostatic capacity of laminated film is several tens percent higher than that of polyurea thin film only. It is caused by increase of surface area owing to roughness of the surface of PZT film. Dielectric loss tangents of laminated films at 1kHz were measured and showed constant value independently of their film thickness. By change of the thickness of PZT films and polyurea thin films, electrostatic capacity and breakdown voltage can be controlled.

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