Preparation of TiN films by a reactive magnetron sputtering.

• 1 January 1986
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 29  (3) , 152-159
• https://doi.org/10.3131/jvsj.29.152

Abstract

Keywords

• MAGNETRON SPUTTERING
• TIN FILMS
• REACTIVE MAGNETRON
• PREPARATION OF TIN