On-chip Integration Of High-voltage Generator Circuits For An Electrostatic Micromotor
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 150-153
- https://doi.org/10.1109/sensor.1995.717118
Abstract
This paper presents a high-voltage generator circuit as power supply for an electrostatic micromotor with process integration based on a standard 2/spl mu/m CMOS technology. This voltage multiplier circuit utilizes n-type wells in a standard 2/spl mu/m CMOS process as a vital innovation to achieve electrically isolated and floated diodes. This design secures a high-voltage output limited only by the breakdown voltage of n-well to p-substrate pn junctions. For the process we used, the power supply can provide /spl equiv/50V output by inputting 5V dc power and two non-overlapping 0/5V clock signals.Keywords
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