Submicron Epitaxial Films for GaAs Field Effect Transistors

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (4) , 541-641
• https://doi.org/10.1149/1.2403496

Abstract

Keywords

• FIELD EFFECT TRANSISTORS
• EPITAXIAL FILMS
• GAAS FIELD
• SUBMICRON EPITAXIAL