Novel Functional Polymers from N-(Tosyloxy)maleimide. Photochemical Acid Generation in Solid-State and Application as Resist Materials
- 1 August 1994
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 6 (8) , 1452-1456
- https://doi.org/10.1021/cm00044a051
Abstract
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