Electrical conduction in reactively sputtered silicon nitride films at medium field strengths
- 16 March 1981
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 64 (1) , 159-167
- https://doi.org/10.1002/pssa.2210640117
Abstract
No abstract availableKeywords
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