Optical absorption in TiNxOy-compounds
- 1 May 1987
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (9) , 4606-4611
- https://doi.org/10.1063/1.338370
Abstract
Thin films of Ti, TiNx, and TiNxOy were prepared by dc reactive magnetron sputtering. The normal spectral reflectance and transmittance of films were measured in the spectral region of 0.4–25 μm. The free electron contribution to the optical properties has been determined from measurements of the Hall coefficient and the dc resistivity. Optical band‐band transitions, that are found in TiNxOy, are compared to the calculated band structure of TiN and TiO.This publication has 7 references indexed in Scilit:
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