Thermal desorption spectroscopy study of HF/DF-treated Si(100) surfaces

• 1 November 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 13  (6) , 2709-2714
• https://doi.org/10.1116/1.579472

Abstract

Keywords

• THERMAL DESORPTION SPECTROSCOPY